JPH0266232U - - Google Patents
Info
- Publication number
- JPH0266232U JPH0266232U JP14332588U JP14332588U JPH0266232U JP H0266232 U JPH0266232 U JP H0266232U JP 14332588 U JP14332588 U JP 14332588U JP 14332588 U JP14332588 U JP 14332588U JP H0266232 U JPH0266232 U JP H0266232U
- Authority
- JP
- Japan
- Prior art keywords
- reaction gas
- reaction
- laser beam
- nozzle
- supplying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012495 reaction gas Substances 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14332588U JPH0266232U (en]) | 1988-11-01 | 1988-11-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14332588U JPH0266232U (en]) | 1988-11-01 | 1988-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0266232U true JPH0266232U (en]) | 1990-05-18 |
Family
ID=31410044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14332588U Pending JPH0266232U (en]) | 1988-11-01 | 1988-11-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0266232U (en]) |
-
1988
- 1988-11-01 JP JP14332588U patent/JPH0266232U/ja active Pending
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